參觀人氣統計
當日人次: 129
累積人次: 265569
2013台日韓WPT研討會-活動花絮
The First Taiwan-Japan-Korea Joint Symposium for Wafer Planarization Technology (WPT2013)
IB-202, National Taiwan University of Science and Technology, Taipei, Taiwan, February 25th, 2013
Each presenter will present 15 minutes followed by 5minutes Q&A
夥伴學校-台灣科技大學舉辦 時間：102年2月25日
IB-202, National Taiwan University of Science and Technology, Taipei, Taiwan, February 25th, 2013
| 9:00~9:30 | Registration |
| 9:30~10:00 | Opening |
| 10:00~10:30 | Coffee Break |
| 10:30~12:00 | Section 1 (chair: Prof. Haedo Jeong) |
| Study on Variable Rotation Polishing in CMP Process (1st report) -Investigation of the Variable Rotation Polishing Efficiency- Presenter: Mr. Pipat Paisalpanumas, KyuTech |
|
| Effect of platen Geometry on Thickness Variation of Sapphire Wafer in Diamond Mechanical Polishing Presenter: Dr. Hyungjae Kim, Pusan University |
|
| A Study of Material Removal Amount of Sapphire Wafer in Application of Chemical Mechanical Polishing With Different Polishing Pads Presenter: Mr. Ying-Chih Hsu, Taiwan Tech |
|
| Evaluation on the Subsurface Damaged Layer of Sapphire Wafer by CMP and Etching Presenter: Mr. Chuljin Kim, Pusan University |
|
| 12:00~13:30 | Lunch Break |
| 13:30~15:00 | Section 2 (Chair: Prof. Keisuke Suzuki) |
| Research on Hybird-Energy Assisted Planarization for Polishing of Hydrolysis LAO Substrates Presenter: Mr. Wei-Kang Tu, Taiwan Tech |
|
| Chemical Mechanical Planarization of Cu Hybrid Structure for Fine Pattern Formation Presenter: Mr. Soocheon Jang, Pusan University |
|
| Development of Laser Abrasion Method Against Soft Resin Material by ArF Excimer Laser Irradiation Presenter: Mr. Kazuki Soejima, KyuTech |
|
| Development of Roll CMP System and Its Application Presenter: Mr. Seongsoo Kim, Pusan University |
|
| 15:00~15:30 | Coffee Break |
| 15:30~16:30 | Section 3 (Chair: Prof. Chunhui Chung) |
| Development of Intelligent Pad and Its Application Presenter: Mr. Changsuk Lee, Pusan University |
|
| Study on Micro Pattered Polishing Pad Fabrication by MEMS Technology Presenter: Mr. Shintarou Isono, KyuTech |
|
| Pad Analysis for High Effective CMP Presenter: Mr. Sin-Hau Huang, Taiwan Tech |
|
| 16:30~17:00 | Closing Workshop |
2013台日韓WPT研討會-活動花絮
The First Taiwan-Japan-Korea Joint Symposium for Wafer Planarization Technology (WPT2013)夥伴學校-台灣科技大學舉辦 時間：102年2月25日